The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2020
Filed:
Apr. 06, 2018
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jeffrey W. Anthis, San Jose, CA (US);
Atashi Basu, Menlo Park, CA (US);
David Thompson, San Jose, CA (US);
Nasrin Kazem, Sunnyvale, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 15/06 (2006.01); C23C 16/455 (2006.01); C23C 16/18 (2006.01);
U.S. Cl.
CPC ...
C07F 15/065 (2013.01); C23C 16/18 (2013.01); C23C 16/45553 (2013.01);
Abstract
Metal coordination complexes comprising at least one diazabutadiene based ligand having a structure represented by: where Rand Rare selected from the group consisting of C4-C10 alkyl groups; and Rand Rare each independently selected from the group consisting of H, C1-C6 alkyl, cycloalkyl, or aryl groups and the difference in the number of carbons in Rand Ris greater than or equal to 2. Processing methods using the metal coordination complexes are also described.