The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2020
Filed:
Mar. 30, 2016
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); G03F 7/20 (2006.01); B65G 49/06 (2006.01); G03F 7/00 (2006.01); G02F 1/13 (2006.01); H01L 21/64 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B65G 49/06 (2013.01); B65G 49/061 (2013.01); B65G 49/064 (2013.01); B65G 49/065 (2013.01); B65G 49/067 (2013.01); G02F 1/13 (2013.01); G03F 7/0005 (2013.01); G03F 7/20 (2013.01); G03F 7/70 (2013.01); H01L 21/64 (2013.01); H01L 21/67703 (2013.01); H01L 21/68707 (2013.01); H01L 21/68728 (2013.01); H01L 21/68742 (2013.01); B65G 2249/045 (2013.01);
Abstract
A carrying method of carrying a substrate with a substrate holder, including: holding a part of the substrate located above the substrate holder using holding pads; controlling and driving downward the holding pads holding the substrate so that the substrate is supported on the support surface of the substrate holder, when releasing the hold of an other part of the substrate by a substrate carry-in hand that holds the other part of the substrate located above the substrate holder. Accordingly, the substrate carriage to the substrate holder can be swiftly performed.