The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 18, 2020

Filed:

Aug. 02, 2018
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-Do, KR;

Inventors:

Chan-Sic Yoon, Anyang-si, KR;

Dongoh Kim, Daegu, KR;

Kiseok Lee, Hwaseong-si, KR;

Sunghak Cho, Hwaseong-si, KR;

Jemin Park, Suwon-si, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01); H01L 21/762 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
H01L 27/10897 (2013.01); H01L 21/76229 (2013.01); H01L 27/10814 (2013.01); H01L 27/10823 (2013.01); H01L 27/10847 (2013.01); H01L 27/10876 (2013.01); H01L 27/10891 (2013.01); H01L 27/10894 (2013.01); H01L 21/31111 (2013.01); H01L 21/31144 (2013.01);
Abstract

A semiconductor device includes a substrate that includes a cell region and a peripheral circuit region, a cell insulating pattern disposed in the cell region of the substrate that defines a cell active region, and a peripheral insulating pattern disposed in the peripheral circuit region of the substrate that defines a peripheral active region. The peripheral insulating pattern includes a first peripheral insulating pattern having a first width and a second peripheral insulating pattern having a second width greater than the first width. A topmost surface of at least one of the first peripheral insulating pattern and the second peripheral insulating pattern is positioned higher than a topmost surface of the cell insulating pattern.


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