The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 18, 2020

Filed:

Dec. 26, 2014
Applicant:

Tovis Co., Ltd., Incheon, KR;

Inventor:

Gi Yun Eom, Incheon, KR;

Assignee:

TOVIS CO., LTD., Incheon, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/306 (2006.01); G02F 1/1333 (2006.01); G02F 1/13 (2006.01); G02F 1/1335 (2006.01); G02F 1/1345 (2006.01);
U.S. Cl.
CPC ...
H01L 21/30604 (2013.01); G02F 1/1303 (2013.01); G02F 1/1333 (2013.01); G02F 1/1335 (2013.01); G02F 1/1345 (2013.01); G02F 1/133305 (2013.01); G02F 2001/133368 (2013.01); G02F 2001/133388 (2013.01);
Abstract

Provided is an etching delay element for forming a protruding portion at an object by shielding part of the object against etching, the etching delay element being attached to a non-etching section of the object corresponding to the protruding portion and being made of a material that is etchable by an etchant.


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