The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2020
Filed:
Jul. 03, 2018
Horiba Stec, Co., Ltd., Kyoto-shi, Kyoto, JP;
Hiroshi Nishizato, Kyoto, JP;
HORIBA STEC, Co., Ltd., Kyoto-shi, Kyoto, JP;
Abstract
In order to provide a fluid control device capable of making the control accuracy of the flow rate or pressure of fluid passing through a valve during each ON interval of pulse control higher than before, the control mechanism includes: a pulse signal generator adapted to input a pulse signal having a predetermined pulse height and a predetermined pulse width to the first valve; a feedback value calculator adapted to, on the basis of a pressure value measured by a pressure sensor, as a feedback value, calculate the time integrated value of a pressure drop occurring in an internal volume during an ON interval when the first valve is opened; and a signal compensator adapted to, on the basis of the deviation between the feedback value and a reference value, compensate the pulse signal to be inputted from the pulse signal generator to the first valve.