Waveguide structure

Abstract

A waveguide structure including a waveguide having a thermally controllable section, and a method of manufacturing the structure. The waveguide structure comprises a plurality of layers. The layers comprise, in order: a substrate (), a sacrificial layer (), a lower cladding layer (), a waveguide core layer (), and an upper cladding layer (). The lower cladding layer, waveguide core layer, and upper cladding layer form the waveguide, the waveguide has a waveguide core. The waveguide structure has a continuous via () passing through the upper cladding layer, waveguide core layer, and lower cladding layer and running parallel to the waveguide ridge () along substantially the whole length of the thermally controllable section. The waveguide structure also has a thermally insulating region () in the sacrificial layer extending at least from the via to beyond the waveguide ridge along the whole length of the thermally controllable section. The sacrificial layer comprises a sacrificial material outside of the thermally insulating region, and a thermally insulating gap () or thermally insulating material separating the lower cladding layer and substrate inside the thermally insulating region. The structure is manufactured by providing a wet etch to the sacrificial layer through the via in order to remove material from at least the thermally insulating region.