The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2020

Filed:

Apr. 03, 2017
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Yongseop Yoon, Seoul, KR;

Sungchan Kang, Hwaseong-si, KR;

Cheheung Kim, Yongin-si, KR;

Sangha Park, Seoul, KR;

Choongho Rhee, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/113 (2006.01); H03H 9/02 (2006.01); G01H 1/00 (2006.01); G01H 11/08 (2006.01); H01L 41/047 (2006.01); H03H 9/17 (2006.01); H03H 9/15 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02244 (2013.01); G01H 1/00 (2013.01); G01H 11/08 (2013.01); H01L 41/047 (2013.01); H01L 41/0477 (2013.01); H01L 41/1136 (2013.01); H03H 9/17 (2013.01); H03H 2009/155 (2013.01);
Abstract

A piezoelectric micromechanical resonator includes a supporting beam including a fixed edge that is fixed to a supporting member and a free edge opposite the fixed edge, a piezoelectric sensor including an edge attached to the supporting member, the piezoelectric sensor further including a lower electrode, a piezoelectric unit, and an upper electrode sequentially stacked on a surface of the supporting beam, and a lumped mass provided on the surface of the supporting beam at a side of the supporting beam including the free edge, the upper electrode having a Young's modulus smaller than a Young's modulus of the lower electrode.


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