The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2020

Filed:

Nov. 21, 2017
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;

Inventors:

Seita Takahashi, Nagaokakyo, JP;

Hiroaki Kaida, Nagaokakyo, JP;

Kenyo Makino, Nagaokakyo, JP;

Hiroyuki Araya, Nagaokakyo, JP;

Assignee:

MURATA MANUFACTURING CO., LTD., Nagaokakyo-Shi, Kyoto-Fu, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 3/04 (2006.01); H03H 9/09 (2006.01); H03H 9/05 (2006.01); H03H 9/10 (2006.01); H03H 9/24 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01); H03H 9/19 (2006.01); H01L 41/23 (2013.01); H01L 41/29 (2013.01);
U.S. Cl.
CPC ...
H03H 3/04 (2013.01); H03H 9/02574 (2013.01); H03H 9/0509 (2013.01); H03H 9/0519 (2013.01); H03H 9/10 (2013.01); H03H 9/1021 (2013.01); H03H 9/132 (2013.01); H03H 9/19 (2013.01); H03H 9/2405 (2013.01); H01L 41/23 (2013.01); H01L 41/29 (2013.01); H03H 2003/0414 (2013.01); H03H 2003/0428 (2013.01); Y10T 29/42 (2015.01);
Abstract

A method of manufacturing a piezoelectric resonator unit that includes mounting a piezoelectric resonator on a base member using a conductive adhesive, keeping the piezoelectric resonator in an environment having a temperature and a humidity higher than those of a surrounding region for a predetermined time, performing frequency adjustment of the piezoelectric resonator by etching using an ion beam, and joining a lid member to the base member using a joining material such that the piezoelectric resonator is hermetically sealed between the lid member and the base member.


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