The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2020

Filed:

Mar. 28, 2018
Applicant:

Tianma Japan, Ltd., Kawasaki, Kanagawa, JP;

Inventor:

Hiroyuki Sekine, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/146 (2006.01); H01L 29/786 (2006.01); G01T 1/24 (2006.01); H01L 31/0216 (2014.01); H01L 29/45 (2006.01); H01L 27/12 (2006.01); H01L 31/115 (2006.01); H01L 31/0376 (2006.01); H01L 27/32 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14663 (2013.01); G01T 1/241 (2013.01); H01L 27/124 (2013.01); H01L 27/1225 (2013.01); H01L 27/14614 (2013.01); H01L 27/14636 (2013.01); H01L 27/3258 (2013.01); H01L 29/45 (2013.01); H01L 29/7869 (2013.01); H01L 29/78648 (2013.01); H01L 31/02161 (2013.01); H01L 31/03762 (2013.01); H01L 31/115 (2013.01);
Abstract

An image sensor includes a plurality of pixels arranged in matrix, and each pixel includes a first TFT having a first gate electrode and a second gate electrode that are arranged on a substrate, a second TFT, and a photoelectric conversion element that has a first electrode electrically connected to a first surface of an a-Si thin film and the second gate electrode of the first TFT and a second electrode connected to a second control line, and that is arranged above the first TFT so as to be superposed on the first TFT in an laminated direction. Provided is a gas barrier film that is positioned between the first and the second TFTs and the photoelectric conversion element and that prevents hydrogen from permeating into the first and the second TFTs, the first electrode and the second gate electrode are constructed by the same layer, and the gas barrier film is not provided with an aperture in each of the pixels.


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