The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2020

Filed:

Nov. 29, 2016
Applicant:

Tunable Infrared Technologies As, Oslo, NO;

Inventor:

Ib-Rune Johansen, Oslo, NO;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 11/02 (2006.01); G01L 11/04 (2006.01); G01N 21/17 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
G01L 11/02 (2013.01); G01L 9/0076 (2013.01); G01L 11/04 (2013.01); G01N 21/1702 (2013.01); G01N 2021/1704 (2013.01);
Abstract

An optical pressure sensor, such as a microphone, is constituted by two membranes, but where the sound does not arrive perpendicular to the membrane, but comes in from the side. The membranes may be parallel as in a Fabry-Perot or slightly skew as in an Air-wedge shearing interferometer. The pressure sensor uses interferometric readout, and consists of two membranes with essentially equal characteristics, where at least one of the membranes is partially transmitting and partially reflective and the other membrane is at least partially reflective, the membranes being separated by a cavity defined by a spacer part, where the distance between the membranes is variable to provide a shift sensitive Fabry-Perot resonator, and where the two membranes have a common back volume being sealed or essentially sealed in the frequency one wish to measure, and where a pressure increase results in that the distance between the membranes move in opposite directions.


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