The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2020
Filed:
Sep. 23, 2016
Yoshihiro Haseko, Tokyo, JP;
Yota Yamamoto, Tokyo, JP;
Yoshihiro Haseko, Tokyo, JP;
Yota Yamamoto, Tokyo, JP;
MITSUMI ELECTRIC CO., LTD., Tokyo, JP;
Abstract
A disclosed flow rate sensor has a heat element and a plurality of temperature detectors, and in a state in which the heat element generates heat, a flow rate of a fluid flowing on the temperature detectors is detected, based on temperature detection results of each of the temperature detectors. The flow rate sensor includes a semiconductor substrate having a frame shape with an opening, a diaphragm part provided on the semiconductor substrate, and the heat element and the plurality of temperature detectors provided on the diaphragm part. The diaphragm part has a thin film structure part that covers the opening, and in a plan view, the plurality of temperature detectors are arranged in a periphery of the heat element.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile