The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2020
Filed:
Mar. 21, 2017
John Zink Company, Llc, Tulsa, OK (US);
Dave Giltner, Boulder, CO (US);
Andrew D. Sappey, Lakewood, CO (US);
ONPOINT TECHNOLOGIES, LLC, Wichita, KS (US);
Abstract
Sensing of gas species characteristics within a process chamber includes selectively projecting a beam of a first select lasing frequency therethough. The beam is optically coupled to a detector to detect a process transmission spectrum having an absorption dip at a select lasing frequency caused by a gas species characteristic. The beam is selectively projected through a fiber Bragg grating which is formed in an optical fiber core to partially reflect at least a portion of the beam of the first select lasing frequency while passing a remainder of the beam. The remainder of the beam has an FBG transmission spectrum mimicking the absorption dip at or near the select lasing frequency caused by a gas species characteristic of interest. It is optically coupled the detector. Outputs of the detector are monitored to compare the FBG transmission spectrum to any process transmission spectrum produced in the process chamber.