The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2020

Filed:

Dec. 13, 2017
Applicants:

Boe Technology Group Co., Ltd., Beijing, CN;

Hefei Xinsheng Optoelectronics Technology Co., Ltd., Hefei, Anhui, CN;

Inventors:

Qinghua Zou, Beijing, CN;

Shupeng Guo, Beijing, CN;

Bin Bu, Beijing, CN;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/24 (2006.01); H01L 51/56 (2006.01); C23C 14/12 (2006.01); C23C 16/455 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/24 (2013.01); C23C 14/12 (2013.01); C23C 14/243 (2013.01); C23C 16/45578 (2013.01); H01L 51/56 (2013.01); H01L 51/001 (2013.01);
Abstract

An assembly and a device for vapor deposition are provided in this disclosure, an assembly includes a cell and a housing, the cell is accommodated in the housing, the gaseous materials to be vapor deposited eject from the housing and are vapor deposited onto the substrate. The housing is capable of rotating relative to the cell. The film layer structure can be obtained by controlling the angles of rotation of the housing. Single film layer as well as the composite film layer with various changes of doping ratio can be formed on the substrate of the assembly and the device for vapor deposition in this disclosure.


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