The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2020
Filed:
Mar. 02, 2018
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Takashi Matsumoto, Yamanashi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B05D 3/06 (2006.01); C23C 14/22 (2006.01); C23C 16/26 (2006.01); C23C 16/452 (2006.01); C23C 16/48 (2006.01); C23C 14/02 (2006.01); C23C 18/14 (2006.01); C23C 14/58 (2006.01); C23C 14/06 (2006.01);
U.S. Cl.
CPC ...
C23C 14/221 (2013.01); C23C 14/024 (2013.01); C23C 14/0605 (2013.01); C23C 14/5833 (2013.01); C23C 16/26 (2013.01); C23C 16/452 (2013.01); C23C 16/486 (2013.01); C23C 18/14 (2013.01);
Abstract
There is provided a method for manufacturing graphene. The method includes an adsorption step of causing six-membered ring structures of carbon atoms to be adsorbed to a surface of a substrate; and an irradiation step of irradiating the surface of the substrate with a beam of a molecule containing carbon atoms.