The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2020
Filed:
Mar. 08, 2017
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Yoko Ishitsuka, Joetsu, JP;
Atsushi Watabe, Joetsu, JP;
Daijitsu Harada, Joetsu, JP;
Masaki Takeuchi, Joetsu, JP;
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03B 33/02 (2006.01); G01B 11/06 (2006.01); B28D 5/00 (2006.01); C03C 3/06 (2006.01); C03C 15/00 (2006.01); C03C 17/28 (2006.01); G01N 21/23 (2006.01);
U.S. Cl.
CPC ...
C03B 33/02 (2013.01); B28D 5/00 (2013.01); C03C 3/06 (2013.01); C03C 15/00 (2013.01); C03C 17/28 (2013.01); G01B 11/06 (2013.01); C03C 2201/02 (2013.01); C03C 2203/50 (2013.01); C03C 2218/114 (2013.01); C03C 2218/32 (2013.01); G01N 21/23 (2013.01);
Abstract
Synthetic quartz glass substrates are prepared by furnishing a synthetic quartz glass block, coating two opposed surfaces of the glass block with a liquid having a transmittance of at least 99.0%/mm at a birefringence measuring wavelength, measuring a birefringence of the glass block by directing light thereacross, determining a slice thickness on the basis of the birefringence measurement and the dimensions of the substrate, and slicing the glass block at the determined slice thickness.