The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2020

Filed:

Apr. 25, 2018
Applicant:

Stmicroelectronic S.r.l., Agrate Brianza, IT;

Inventors:

Mohammad Abbasi Gavarti, Milan, IT;

Daniele Caltabiano, Agrate Brianza, IT;

Anna Angela Pomarico, San Cesario Lecce, IT;

Giuditta Roselli, Lecce, IT;

Assignee:

STMICROELECTRONICS S.r.l., Agrate Brianza, IT;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); H01L 41/113 (2006.01); B81C 1/00 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0021 (2013.01); B81C 1/00269 (2013.01); G01L 9/0042 (2013.01); H01L 41/1132 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0109 (2013.01); B81B 2207/07 (2013.01); B81B 2207/093 (2013.01); B81C 2203/0109 (2013.01);
Abstract

A microelectromechanical transducer includes: a semiconductor body, having a first surface and a second surface opposite to one another; a first structural body, coupled to the first surface of the semiconductor body; a first sealed cavity between the semiconductor body and the first structural body; and an active area housed in the first sealed cavity, including at least two trenches and a sensor element between the trenches. The trenches extend along a vertical direction from the first surface towards the second surface of the semiconductor body.


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