The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2020
Filed:
Apr. 09, 2018
Lam Research Corporation, Fremont, CA (US);
Dennis Smith, San Jose, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
Methods and systems for preparing a hole having an accurately controlled area in an orifice plate for a mass flow controller are provided. Methods involve forming an initial hole in the orifice plate. The initial hole has an opening having an initial area. The orifice plate comprises a material that can react to form a coating on the orifice plate. The coating occupies a greater volume than the material consumed to form the coating. The material of the orifice plate is reacted with a reactant to produce the coating and thereby produce a reduced area hole having an opening with a reduced area that is smaller than the initial area. The reduced area hole is measured. A determined amount of the coating is removed from at least the reduced area hole to produce a final hole in the orifice plate, wherein the reduced area is smaller than an opening area of the final hole.