The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 04, 2020

Filed:

Aug. 30, 2018
Applicant:

Murata Machinery, Ltd., Kyoto-Fu, JP;

Inventors:

Fachri Atamny, Richterswil, CH;

Gerhard Dovids, Grabs, CH;

Yves Fenner, Berg, CH;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/673 (2006.01); H01L 21/687 (2006.01); G05B 19/418 (2006.01); B65G 1/14 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67769 (2013.01); G05B 19/41815 (2013.01); H01L 21/67386 (2013.01); H01L 21/68707 (2013.01); B65G 1/14 (2013.01); G05B 2219/31216 (2013.01); G05B 2219/45031 (2013.01); H01L 21/67781 (2013.01);
Abstract

Methods, systems and apparatuses for an improved wafer and substrate carrier or container with improved modularity. More specifically, to a carrier or container with improved abilities which may provide high or low density carriers or containers with improved interchanging and compatibility, including for Tec-Cells, FOUPs, and other third party containers, carriers, modules, rings or any other systems, structures, apparatuses, or methods associated. The invention may provided an ability to interchange or be cross-compatible such as wherein Tec-Cell carriers, containers, rings or modules may be provided to be housed in a FOUP or other third party carrier or wherein substrates or wafers held in the Tec-Cell Carriers, rings, containers, or modules, and then held within the FOUP.


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