The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 04, 2020

Filed:

Jun. 03, 2015
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Jennifer Sun, Mountain View, UT (US);

Biraja P. Kanungo, San Jose, CA (US);

Tom Cho, Los Altos, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 1/02 (2006.01); B32B 5/00 (2006.01); H01J 37/32 (2006.01); C23C 16/44 (2006.01); C04B 41/87 (2006.01); C04B 41/00 (2006.01); C04B 41/50 (2006.01); C23C 4/11 (2016.01); C23C 4/134 (2016.01);
U.S. Cl.
CPC ...
H01J 37/32495 (2013.01); C04B 41/009 (2013.01); C04B 41/5045 (2013.01); C04B 41/87 (2013.01); C23C 4/11 (2016.01); C23C 4/134 (2016.01); C23C 16/4404 (2013.01); Y10T 428/131 (2015.01); Y10T 428/26 (2015.01);
Abstract

An article includes a body that is coated with a ceramic coating. The ceramic coating may include YOin a range between about 45 mol % to about 99 mol %, ZrOin a range between about 1 mol % to about 55 mol %, and AlOin a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include YOin a range between about 45 mol % to about 99 mol % and AlOin a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include YOin a range between about 45 mol % to about 99 mol % and ZrOin a range between about 1 mol % to about 55 mol %.


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