The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2020
Filed:
Sep. 25, 2017
Daihen Corporation, Osaka-shi, Osaka, JP;
Tatsuya Morii, Osaka, JP;
Masayuki Nakahama, Osaka, JP;
DAIHEN Corporation, Osaka-shi, Osaka, JP;
Abstract
Provided is an impedance matching device for matching an impedance between a high-frequency power source and a load. The impedance matching device pertaining to the present invention is provided with: a matching circuit having variable capacitors, a capacitance of which is adjusted by an ON/OFF operation of a plurality of switches; a switch control unit for performing control for causing states of the switches of the variable capacitors to coincide with a target state in order to adjust the capacitance of the variable capacitors; and a switch state evaluation unit for evaluating whether a switch is in a state requiring suppression of a temperature increase. The switch control unit is configured so that when the switch state evaluation unit evaluates that a switch of the variable capacitors is in a state requiring suppression of a temperature increase, control is performed for suspending changing of a switch state of the switch for a set period and suppressing a temperature increase in the switch.