The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2020
Filed:
Nov. 30, 2017
Applicant:
Invensense, Inc., San Jose, CA (US);
Inventors:
Matthew Thompson, Beaverton, OR (US);
Houri Johari-Galle, San Jose, CA (US);
Leonardo Baldasarre, Gavirate, IT;
Sarah Nitzan, Palo Alto, CA (US);
Kirt Williams, Portola Valley, CA (US);
Assignee:
InvenSense, Inc., San Jose, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 15/08 (2006.01); B81B 7/02 (2006.01); G01P 15/125 (2006.01); B81B 5/00 (2006.01);
U.S. Cl.
CPC ...
G01P 15/08 (2013.01); B81B 5/00 (2013.01); B81B 7/02 (2013.01); G01P 15/125 (2013.01); B81B 2201/0235 (2013.01); G01P 2015/0831 (2013.01); G01P 2015/0862 (2013.01); G01P 2015/0871 (2013.01);
Abstract
A microelectromechanical (MEMS) accelerometer senses linear acceleration perpendicular to a MEMS device plane of the MEMS accelerometer based on a rotation of a proof mass out-of-plane about a rotational axis. A symmetry axis is perpendicular to the rotational axis. The proof mass includes a symmetric portion that is symmetric about the symmetry axis and that is contiguous with an asymmetric portion that is asymmetric about the symmetry axis.