The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 04, 2020

Filed:

May. 29, 2019
Applicant:

Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v., Munich, DE;

Inventors:

Heinrich Grueger, Dresden, DE;

Jens Knobbe, Dresden, DE;

Tino Puegner, Dresden, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/28 (2006.01); G01J 3/26 (2006.01); G01J 3/18 (2006.01); G01J 3/06 (2006.01); G01J 3/14 (2006.01); G01J 3/12 (2006.01);
U.S. Cl.
CPC ...
G01J 3/26 (2013.01); G01J 3/06 (2013.01); G01J 3/14 (2013.01); G01J 3/18 (2013.01); G01J 2003/1295 (2013.01);
Abstract

A spectroscopic instrument includes a first aperture limiting device, a second aperture limiting device, a first mirror, a movable MEMS mirror, and a dispersive element spatially separate from the MEMS mirror, the movable MEMS mirror being movable in relation to the dispersive element, the movable MEMS mirror being monolithically configured as a common component with at least one of the first aperture limiting device, the second aperture limiting device, and the dispersive element, and the first and second aperture limiting devices being arranged to be spatially separate from the movable MEMS mirror and having a lateral offset from a rotational axis of the movable MEMS mirror.


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