The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 04, 2020

Filed:

Nov. 15, 2019
Applicant:

Industry-academic Cooperation Foundation, Dankook University, Yongin-si, Gyeonggi-do, KR;

Inventors:

Daekeun Kim, Seoul, KR;

Se Won Kang, Seongnam-si, KR;

Inkeon Ryu, Busan, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/24 (2006.01); G06T 7/55 (2017.01); G01B 11/25 (2006.01); G01B 11/00 (2006.01); G01B 11/22 (2006.01); G06T 7/571 (2017.01);
U.S. Cl.
CPC ...
G01B 11/24 (2013.01); G01B 11/002 (2013.01); G01B 11/22 (2013.01); G01B 11/25 (2013.01); G06T 7/55 (2017.01); G06T 7/571 (2017.01);
Abstract

A 3D profile measurement method includes: forming structured light having a sinusoidal intensity pattern by forcing light to pass through a grating filter and an objective lens; acquiring a structured illumination image of a measurement object by photographing the measurement object with the structured light projected thereon at predetermined intervals in a height direction of the measurement object and a uniform illumination image of the measurement object is acquired by photographing the measurement object under illumination with general light rather than the structured light; generating a Hi-Lo image by using the structured illumination image and the uniform illumination image at each height of the measurement object; extracting height-specific intensity of respective pixels in the plural Hi-Lo images; and generating a 3D profile of the measurement object based on the obtained surface position.


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