The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2020
Filed:
Nov. 21, 2017
Applicant:
Tdk Corporation, Tokyo, JP;
Inventors:
Takahiro Shiohara, Tokyo, JP;
Takeshi Kamono, Tokyo, JP;
Assignee:
TDK CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/24 (2006.01); H01L 31/107 (2006.01); H02M 7/48 (2007.01); H01L 41/107 (2006.01);
U.S. Cl.
CPC ...
H05H 1/2406 (2013.01); H01L 41/107 (2013.01); H02M 7/48 (2013.01);
Abstract
A plasma generator capable of adjusting the amount of plasma generation in a simple configuration includes a control circuit controlling a frequency of an AC power supplied to a piezoelectric transformer and a control signal generation circuit providing a control signal to the control circuit. The plasma generator is configured so that the control signal output from the control signal generation circuit is appropriately adjusted. The control circuit controls the frequency of the AC power so as to bring a target value, which is set based on the control signal provided from the control signal generation circuit.