The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2020
Filed:
Dec. 03, 2017
Xingtao Wu, Woburn, MA (US);
Xingtao Wu, Woburn, MA (US);
Other;
Abstract
A method of fabricating pre-structured functional wafers, pre-structured functional cuboid or wafer stack, and a method of fabricating an array of functional multilayer stack actuators made of relaxor ferroelectric single crystal piezoelectric thin layers comprising sequentially repeated steps of wafer dicing and trench refilling into relatively thick wafer(s). A bulk-micromachined dimensioned deformable mirror device comprising a base supporting substrate, a plurality of stack actuators that is made by segmenting a pre-structured relaxor ferroelectric single crystal piezoelectric cuboid or wafer stack, a plurality of pedestals disposed on the plurality of stack actuators; a deformable membrane mirror mounted on said pedestals; and a plurality of addressable electrode contacts.