The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2020
Filed:
Apr. 19, 2018
Shin-etsu Polymer Co., Ltd., Tokyo, JP;
National University Corporation Saitama University, Saitama, JP;
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Junichi Ikeno, Saitama, JP;
Yohei Yamada, Saitama, JP;
Hideki Suzuki, Saitama, JP;
Hitoshi Noguchi, Tokyo, JP;
SHIN-ETSU POLYMER CO., LTD., Tokyo, JP;
NATIONAL UNIVERSITY CORPORATION SAITAMA UNIVERSITY, Saitama, JP;
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Abstract
A substrate manufacturing method includes: a first step of disposing a condenser for condensing a laser beam in a non-contact manner on a surfaceof a magnesium oxide single crystal substrateto be irradiated; and a second step of irradiating a laser beam to a surface of the magnesium oxide single crystal substrateand condensing the laser beam into an inner portion of the single crystal member under designated irradiation conditions using the condenser, and at a same time, two-dimensionally moving the condenser and the magnesium oxide single crystal substraterelatively to each other, and sequentially forming processing marks to sequentially allow planar peeling.