The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 28, 2020

Filed:

Nov. 25, 2018
Applicant:

Nexchip Semiconductor Co., Ltd, Hefei, Anhui, CN;

Inventor:

Geeng-Chuan Chern, Hefei, CN;

Assignee:

Nexchip Semiconductor Co., Ltd, Xinzhan District, Hefei, Anhui, CN;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G11C 16/04 (2006.01); G11C 11/16 (2006.01); H01L 27/11517 (2017.01); H01L 21/8234 (2006.01); G11C 8/14 (2006.01); G11C 29/00 (2006.01);
U.S. Cl.
CPC ...
G11C 11/1657 (2013.01); G11C 8/14 (2013.01); H01L 21/82345 (2013.01); H01L 27/11517 (2013.01); G11C 16/0483 (2013.01); G11C 29/82 (2013.01);
Abstract

The present invention provides a non-volatile memory cell, array and fabrication method. The memory cell comprises a substrate, a gate structure, a source region and a drain region, wherein the gate structure is formed on the substrate, the gate structure sequentially comprises a first gate dielectric layer, a first conductive layer, a second gate dielectric layer and a second conductive layer from bottom to top, the source region is formed in the substrate, the source region comprises an N-type heavily doped source region, the drain region is formed in the substrate, the drain region comprises an N-type doped drain region and a P-type heavily doped drain region formed in the N-type doped drain region. The non-volatile memory cell and array provided by the present invention have a band-to-band tunneling programming ability and reserve the advantage of high reading current of an N-channel at the same time.


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