The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 28, 2020

Filed:

Apr. 21, 2011
Applicant:

Stergios Logothetidis, Salonika, GR;

Inventor:

Stergios Logothetidis, Salonika, GR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); H01L 51/00 (2006.01); G01N 21/21 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8851 (2013.01); G01N 21/211 (2013.01); H01L 51/0004 (2013.01); G01N 2021/213 (2013.01); H01L 2251/558 (2013.01); Y02E 10/549 (2013.01); Y02P 70/521 (2015.11);
Abstract

The present invention is related to the in-line determination of thickness, optical properties and quality of thin films and multilayer structures of organic (conductors, semiconductors and insulators), hybrid (organic/inorganic) and inorganic (e.g. metals, oxides) materials in real-time by the use of Spectroscopic Ellipsometry—SE, during their printing and/or treating by roll-to-roll and sheet-to-sheet processes. SE unit is located on a stage with the possibility of movement in the lateral direction in relation to the movement of e.g. the roll, taking measurements in the spectral range of Vis-fUV from 1.5-6.5 eV. The method can be used in-line to monitor and control in real-time the printing and surface or bulk treatment processes on flexible rolls or sheets both along and across the web or sheet, in the air or in an environment of nitrogen or other gas, resulting in the production of flexible organic and printed electronic devices such as organic photovoltaics, organic light-emitting diodes etc with controlled and tailored functional properties.


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