The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 28, 2020

Filed:

Jun. 05, 2014
Applicant:

Thomas West, Inc., Sunnyvale, CA (US);

Inventors:

Thomas West, Portola Valley, CA (US);

Long Nguyen, San Jose, CA (US);

Gary Quigley, Loomis, CA (US);

Pepito Galvez, San Jose, CA (US);

Koli Holani, Sunnyvale, CA (US);

Kevin Song, San Jose, CA (US);

Jorge Craik, San Jose, CA (US);

Matt Richardson, Milpitas, CA (US);

Peter McKeever, Redwood City, CA (US);

Assignee:

Thomas West, Inc., Sunnyvale, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 37/22 (2012.01); B24B 37/26 (2012.01); B24D 11/00 (2006.01); B29C 41/04 (2006.01); B24D 18/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B24B 37/22 (2013.01); B24B 37/26 (2013.01); B24D 11/003 (2013.01); B24D 18/00 (2013.01); B29C 41/047 (2013.01); H01L 21/67046 (2013.01);
Abstract

A method for making a multilayer polishing pad includes rotating a cylinder about a central axis. The cylinder encloses in an interior space a single polymer mixture that phase separates under centrifugal force. The method also includes forming the polishing pad from at least some of a polymer formed after the polymer mixture has reacted. The method includes forming at least two distinct layers in the polishing pad by casting and gelling sequentially at least two different polymers.


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