Agitation/defoaming method and agitation/defoaming device

Abstract

[Problem] To provide a agitation/defoaming method and device with which both of uniformity in dispersion of object to be processed and reduction of air bubbles can be achieved with high precision. [Solution] Provided is a agitation/defoaming method for producing orbital and spin motions of a container containing object to be processed by a device provided with orbital and spin drive motors that can independently control the velocities of the orbital and spin motions. Both defoaming and agitating treatments with high precision can be achieved by respectively performing a reverse rotation superimposition processing, wherein the rotational frequency of the spin drive motor is obtained by superimposing the first rotational frequency in a direction opposite to the direction of the orbital motion on the frequency of the orbital motion, and a same rotation superimposition processing, wherein the rotational frequency of the spin drive motor is obtained by superimposing the second rotational frequency in the same direction as the direction of the orbital motion on the frequency of the orbital motion, at least once.