The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2020
Filed:
Sep. 19, 2018
Applicant:
Ngk Insulators, Ltd., Nagoya, Aichi, JP;
Inventors:
Tomoyoshi Tai, Inazawa, JP;
Yuji Hori, Owariasahi, JP;
Keiichiro Asai, Nagoya, JP;
Takashi Yoshino, Ama, JP;
Masashi Goto, Nagoya, JP;
Masahiko Namerikawa, Seto, JP;
Assignee:
NGK INSULATORS, LTD., Nagoya, Aichi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/313 (2013.01); H01L 41/22 (2013.01); H03H 9/02 (2006.01); H01L 41/09 (2006.01); H01L 41/187 (2006.01); H01L 41/337 (2013.01); H03H 9/25 (2006.01); H03H 3/08 (2006.01); H01L 23/00 (2006.01); H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
H01L 41/313 (2013.01); H01L 41/09 (2013.01); H01L 41/187 (2013.01); H01L 41/337 (2013.01); H03H 9/02559 (2013.01); H03H 9/02574 (2013.01); H03H 9/02622 (2013.01); H03H 9/25 (2013.01); H01L 21/2007 (2013.01); H01L 24/83 (2013.01); H03H 3/08 (2013.01); Y10T 29/42 (2015.01);
Abstract
It is formed, over a supporting body made of a ceramic, a bonding layer composed of one or more material selected from the group consisting of mullite, alumina, tantalum pentoxide, titanium oxide and niobium pentoxide. Neutralized beam is irradiated onto a surface of the bonding layer to activate the surface of the bonding layer. The surface of the bonding layer and the piezoelectric single crystal substrate are bonded by direct bonding.