The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2020
Filed:
Mar. 24, 2016
Pico & Tera Co., Ltd., Suwon-si, KR;
Bum Je Woo, Seongnam-si, KR;
Bum Je Woo, Seongnam-si, KR;
Seok Mun Yoon, Suwon-si, KR;
Myoung Sok Han, Yongin-si, KR;
Hyun Sin Kim, Cheonan-si, KR;
PICO & TERA CO., LTD., Suwon, KR;
Other;
Abstract
The present invention relates to a wafer storage container, more particularly, relates to a wafer storage container wherein the space of the wafer storage container is divided into the spaces, namely a storage room, a gas injection room, and a gas exhausting room, which are independent and separate from each other, so when the wafer storage container is transported to the load port and being coupled therewith, the purge gas is injected/exhausted through the separating walls inside the storage room, thereby efficiently removing the remaining fumes on the surface of the wafer.