The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 21, 2020

Filed:

Dec. 22, 2015
Applicant:

Apple Inc., Cupertino, CA (US);

Inventors:

Mark Alan Arbore, Los Altos, CA (US);

Matthew A. Terrel, Campbell, CA (US);

Edward L. Hull, Los Altos, CA (US);

Assignee:

Apple Inc., Cupertino, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 21/00 (2006.01); G01N 21/47 (2006.01); G01N 21/55 (2014.01);
U.S. Cl.
CPC ...
G02B 21/0016 (2013.01); G01N 21/47 (2013.01); G01N 21/55 (2013.01); G02B 21/008 (2013.01); G02B 21/0032 (2013.01); G02B 21/0052 (2013.01); G01N 2201/068 (2013.01); G01N 2201/0638 (2013.01);
Abstract

A confocal inspection system can optically characterize a sample. An objective lens, or separate incident and return lenses, can deliver incident light from a light source to the sample, and can collect light from the sample. Confocal optics can direct the collected light onto a detector. The system can average the incident light over multiple locations at the sample, for example, by scanning the incident light with a pivotable mirror in the incident and return optical paths, or by illuminating and collecting with multiple spaced-apart confocal apertures. The system can average the collected light, for example, by directing the collected light onto a single-pixel detector, or by directing the collected light onto a multi-pixel detector and averaging the pixel output signals to form a single electronic signal. Averaging the incident and/or return light can be advantageous for structured or inhomogeneous samples.


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