The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 21, 2020

Filed:

Sep. 12, 2016
Applicant:

Kurita Water Industries Ltd., Tokyo, JP;

Inventors:

Hiroshi Morita, Tokyo, JP;

Toshimasa Kato, Tokyo, JP;

Shigeyuki Hoshi, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01J 39/04 (2017.01); H01L 21/02 (2006.01); C02F 1/44 (2006.01); C02F 1/62 (2006.01); B01J 47/12 (2017.01); C02F 1/42 (2006.01); B01J 41/04 (2017.01); H01L 21/67 (2006.01); C02F 101/20 (2006.01); C02F 103/04 (2006.01);
U.S. Cl.
CPC ...
B01J 39/04 (2013.01); B01J 41/04 (2013.01); B01J 47/12 (2013.01); C02F 1/42 (2013.01); C02F 1/444 (2013.01); C02F 1/62 (2013.01); H01L 21/02052 (2013.01); C02F 2101/20 (2013.01); C02F 2103/04 (2013.01); H01L 21/67057 (2013.01);
Abstract

The present invention reduces adhesion of trace metals in ultrapure water for cleaning products, and inhibits the metal contamination of an object to be cleaned. Provided is a metal contamination inhibitor that contains a polymer having an ion-exchange group, such as a polystyrene sulfonate having a molecular weight of at least 100,000. Trace metals in ultrapure water are adsorbed through an ion-exchange reaction of the polymer having the ion-exchange group, and can thus be inhibited from adhering to products. Also provided is a method for cleaning a product with ultrapure water to which the metal contamination inhibitor has been added. Preferably, the ultrapure water to which the metal contamination inhibitor has been added flows through a separation membrane module, and the products are cleaned with permeated water.


Find Patent Forward Citations

Loading…