The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2020
Filed:
Sep. 14, 2017
Applicant:
Samsung Electro-mechanics Co., Ltd., Suwon-si, KR;
Inventors:
Je Hong Kyoung, Suwon-si, KR;
Jin Suk Son, Suwon-si, KR;
Hwa Sun Lee, Suwon-si, KR;
Sang Hyun Yi, Suwon-si, KR;
Assignee:
Samsung Electro-Mechanics Co., Ltd., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03H 9/17 (2006.01); H03H 3/02 (2006.01); H03H 3/04 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02047 (2013.01); H03H 3/02 (2013.01); H03H 9/02015 (2013.01); H03H 9/02086 (2013.01); H03H 9/02118 (2013.01); H03H 9/02157 (2013.01); H03H 9/173 (2013.01); H03H 2003/021 (2013.01); H03H 2003/0435 (2013.01); H03H 2003/0442 (2013.01);
Abstract
A bulk acoustic wave resonator includes a substrate protective layer disposed on a top surface of a substrate, a cavity defined by a membrane layer and the substrate, and a resonating part disposed on the membrane layer. The membrane layer includes a first layer and a second layer, the second layer having the same material as the first layer and having a density greater than that of the first layer.