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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10714565 B1

PDFFull Text
Date of Patent:
Jul. 14, 2020

Filed:

Oct. 04, 2019

Semiconductor device with support pattern

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Inventors:

Ki-hyung Nam, Yongin-si, KR;

Bong-Soo Kim, Yongin-si, KR;

Yoosang Hwang, Suwon-si, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-do, KR;

Attorney:

Lee IP Law, P.C.

Primary Examiner:

Cheung Lee

Int. Cl.
CPC ...
H01L 29/41 (2006.01); H01L 49/02 (2006.01); H01L 27/108 (2006.01); H01L 21/311 (2006.01); H01L 21/285 (2006.01); H01L 21/02 (2006.01); H01L 21/3213 (2006.01); H01L 27/112 (2006.01);
U.S. Cl.
CPC ...
H01L 28/90 (2013.01); H01L 21/02164 (2013.01); H01L 21/28525 (2013.01); H01L 21/28568 (2013.01); H01L 21/31111 (2013.01); H01L 21/32139 (2013.01); H01L 27/108 (2013.01); H01L 27/10808 (2013.01); H01L 27/10823 (2013.01); H01L 27/10852 (2013.01); H01L 27/10885 (2013.01); H01L 27/10888 (2013.01); H01L 27/10891 (2013.01); H01L 27/112 (2013.01); H01L 29/41 (2013.01);
Abstract

A semiconductor device including a plurality of pillars on a semiconductor substrate; and a support pattern in contact with some lateral surfaces of the pillars and connecting the pillars with one another, wherein the support pattern includes openings that expose other lateral surfaces of the pillars, each of the pillars includes a first pillar upper portion in contact with the support pattern and a second pillar upper portion spaced apart from the support pattern, and the second pillar upper portion has a concave slope.

Find Patent Forward Citations

Nam, Ki-hyung. (2020). Semiconductor device with support pattern (U.S. Patent No. 10714565). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10714565

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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