The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2020
Filed:
Aug. 19, 2017
Applicant:
Semes Co., Ltd., Chungcheongnam-do, KR;
Inventors:
Min Jung Park, Daegu, KR;
Jung Yul Lee, Chungcheongbuk-do, KR;
Hyun Hee Lee, Chungcheongnam-do, KR;
Soo Hyun Cho, Chungcheongnam-do, KR;
Assignee:
SEMES CO., LTD., Chungcheongnam-Do, KR;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/027 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); F26B 5/04 (2006.01); H01L 21/02 (2006.01); H01L 21/311 (2006.01); H01L 21/683 (2006.01); H01L 21/60 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
H01L 21/302 (2013.01); F26B 5/04 (2013.01); H01L 21/0271 (2013.01); H01L 21/02282 (2013.01); H01L 21/02307 (2013.01); H01L 21/02623 (2013.01); H01L 21/30604 (2013.01); H01L 21/31116 (2013.01); H01L 21/6708 (2013.01); H01L 21/6715 (2013.01); H01L 21/67017 (2013.01); H01L 21/6719 (2013.01); H01L 21/67075 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/67126 (2013.01); H01L 21/67253 (2013.01); H01L 21/683 (2013.01); H01L 21/68742 (2013.01); H01L 21/68764 (2013.01); H01L 21/68792 (2013.01); H01L 2021/60187 (2013.01);
Abstract
Disclosed are an apparatus and a method for treating a substrate. The method includes repeatedly rotating the substrate alternately at a first speed and at a second speed while the treatment liquid is supplied, and the second speed is higher than the first speed.