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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10714351 B1

PDFFull Text
Date of Patent:
Jul. 14, 2020

Filed:

Feb. 07, 2013

Multi-layered substrate manufacturing method

Applicants:

Hidehiro Maeda, Yokohama, JP;

Satoshi Katagiri, Yokohama, JP;

Inventors:

Hidehiro Maeda, Yokohama, JP;

Satoshi Katagiri, Yokohama, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:

Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.

Primary Examiner:

A Dexter Tugbang

Int. Cl.
CPC ...
H01L 21/30 (2006.01); H05K 3/00 (2006.01); H05K 3/46 (2006.01); H05K 13/00 (2006.01); H05K 3/38 (2006.01); H05K 3/32 (2006.01); H01L 21/20 (2006.01); H01L 21/683 (2006.01); H01L 21/67 (2006.01); B32B 38/18 (2006.01); B32B 7/12 (2006.01); B32B 37/10 (2006.01);
U.S. Cl.
CPC ...
H01L 21/30 (2013.01); H01L 21/2007 (2013.01); H01L 21/67092 (2013.01); H01L 21/683 (2013.01); H01L 21/6831 (2013.01); H05K 3/0061 (2013.01); H05K 3/0067 (2013.01); H05K 3/321 (2013.01); H05K 3/325 (2013.01); H05K 3/386 (2013.01); H05K 3/4611 (2013.01); H05K 3/4638 (2013.01); H05K 13/0015 (2013.01); B32B 7/12 (2013.01); B32B 37/10 (2013.01); B32B 38/1833 (2013.01); H01L 2924/00 (2013.01); H01L 2924/0002 (2013.01); Y10T 29/4913 (2015.01); Y10T 29/49126 (2015.01); Y10T 29/5313 (2015.01); Y10T 29/53196 (2015.01); Y10T 156/10 (2015.01);
Abstract

Provided is a substrate holding unit that holds a pair of substrates that are aligned and layered, comprising a first holding member that holds one of the substrates; a plurality of members to be joined that are connected to the first holding member; a second holding member that holds the other of the substrates to face the one of the substrates; a plurality of joining members that exert an adhesion force on the members to be joined and are connected to the second holding member at positions corresponding to positions of the members to be joined; and an adhesion restricting section that restricts the adhesion force until the substrates are aligned.

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