The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2020
Filed:
Feb. 14, 2019
Applicant:
Nissin Ion Equipment Co., Ltd., Koka, JP;
Inventor:
Tetsuro Yamamoto, Koka, JP;
Assignee:
NISSIN ION EQUIPMENT CO., LTD., Koka, Shiga, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/05 (2006.01);
U.S. Cl.
CPC ...
H01J 37/05 (2013.01); H01J 2237/047 (2013.01); H01J 2237/055 (2013.01); H01J 2237/057 (2013.01); H01J 2237/24564 (2013.01);
Abstract
An apparatus is provided. The apparatus includes a beam current measuring device and a first electrode. The beam current measuring device is retractably movable into an ion beam trajectory so as to measure an ion beam current. The first electrode is disposed immediately upstream of the beam current measuring device in an ion beam transport channel. The first electrode serves both as a suppressor electrode for repelling secondary electrons released from the beam current measuring device, back toward the beam current measuring device, and as a beam optical element other than the suppressor electrode.