The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2020
Filed:
Jan. 24, 2018
Applicant:
Shin-etsu Chemical Co., Ltd., Chiyoda-ku, JP;
Inventors:
Yuichi Hamada, Takasaki, JP;
Yu Yanase, Takasaki, JP;
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Chiyoda-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/64 (2012.01); C09J 133/04 (2006.01);
U.S. Cl.
CPC ...
G03F 1/64 (2013.01); C09J 133/04 (2013.01);
Abstract
There is provided a method for procuring an agglutinant structure or in particular an agglutinant layer, from an agglutinant material, which is laid on an end face of a pellicle frame for gluing the pellicle to a photomask, wherein the agglutinant material is processed into the agglutinant layer passing through one more stages wherein the material is under a helium gas atmosphere; the invention is also about a manufacturing method of a pellicle wherein the agglutinant layer is procured in the above described manner.