The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2020
Filed:
Nov. 03, 2016
Applicant:
Board of Regents, the University of Texas System, Austin, TX (US);
Inventors:
Assignee:
Board of Regents, The University of Texas Systems, Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 10/00 (2010.01); G01Q 30/00 (2010.01); G12B 5/00 (2006.01); G01Q 10/04 (2010.01); G01Q 60/24 (2010.01);
U.S. Cl.
CPC ...
G01Q 30/00 (2013.01); G01Q 10/04 (2013.01); G12B 5/00 (2013.01); G01Q 60/24 (2013.01);
Abstract
An example metrology device can include a first stage including a microelectromechanical (MEMS) device having a probe, and a second stage configured to hold a sample. The metrology device can also include a kinematic coupler for constraining the first stage in a fixed position relative to the second stage. The probe of the MEMS device can be aligned with a portion of the sample when the first stage is constrained in the fixed position relative to the second stage.