The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 14, 2020

Filed:

Jun. 05, 2018
Applicant:

Pentagon Technologies Group, Inc., Hayward, CA (US);

Inventors:

David Browne, Pleasanton, CA (US);

Don Lutz, Peoria, AZ (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 35/00 (2006.01); G01N 15/02 (2006.01); H01L 21/67 (2006.01); G01N 15/06 (2006.01); G01N 15/14 (2006.01); G01N 15/00 (2006.01);
U.S. Cl.
CPC ...
G01N 35/00732 (2013.01); G01N 15/0205 (2013.01); G01N 15/065 (2013.01); H01L 21/67253 (2013.01); G01N 2015/0046 (2013.01); G01N 2015/0693 (2013.01); G01N 2015/1486 (2013.01);
Abstract

A particle counting device includes a scanner probe having a first opening for receiving particles from a sample surface and second openings. Pumps produce a first airstream flowing from the first opening and a second airstream flowing to the second openings. A flow device splits the first airstream into third and fourth airstreams. A first particle detector detects particles in the third airstream. The first particle detector is capable of detecting particles within a first range of particle sizes. A second particle detector detects particles in the fourth airstream. The second particle detector is capable of detecting particles within a second range of particle sizes different from the first range of particle sizes. Control circuitry controls the flow device and the pumps to provide a first flow rate of the third airstream and a second flow rate of the fourth airstream that is larger than the first flow rate.


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