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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10712328 B1

PDFFull Text
Date of Patent:
Jul. 14, 2020

Filed:

Mar. 03, 2017

Analysis device

Applicant:

Toshiba Memory Corporation, Minato-ku, Tokyo, JP;

Inventor:

Yuji Yamada, Mie, JP;

Assignee:

TOSHIBA MEMORY CORPORATION, Tokyo, JP;

Attorney:

Foley & Lardner LLP

Primary Examiner:

Kathryn Wright

Int. Cl.
CPC ...
G01N 33/20 (2019.01); G01N 23/20 (2018.01); G01N 23/223 (2006.01); G01N 1/40 (2006.01); G01N 1/38 (2006.01); G01N 1/32 (2006.01); G01N 23/20033 (2018.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
G01N 33/20 (2013.01); G01N 1/32 (2013.01); G01N 1/38 (2013.01); G01N 1/4022 (2013.01); G01N 23/20033 (2013.01); G01N 23/223 (2013.01); G01N 2001/383 (2013.01); G01N 2001/4027 (2013.01); G01N 2033/0095 (2013.01); G01N 2033/0096 (2013.01); H01L 21/67051 (2013.01); H01L 21/67276 (2013.01); H01L 22/12 (2013.01);
Abstract

An analysis device includes a vapor phase decomposition unit, a heating unit, an evacuation unit, a recovery unit and an analysis unit. The vapor phase decomposition unit performs vapor phase decomposition of a first film on a substrate. The heating unit heats the substrate. The evacuation unit evacuates gas in the heating unit to an outside of the heating unit. The recovery unit supplies liquid on a front surface of the substrate, moves the liquid on the front surface of the substrate, and recovers the liquid. The analysis unit analyzes contents of the liquid.

Find Patent Forward Citations

Yamada, Yuji. (2020). Analysis device (U.S. Patent No. 10712328). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10712328

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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