The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 14, 2020

Filed:

Nov. 07, 2016
Applicant:

Azbil Corporation, Chiyoda-ku, JP;

Inventors:

Hidenobu Tochigi, Chiyoda-ku, JP;

Takuya Ishihara, Chiyoda-ku, JP;

Assignee:

Azbil Corporation, Chiyoda-ku, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/12 (2006.01); G01L 27/00 (2006.01); G01L 27/02 (2006.01); G01L 1/14 (2006.01); G01L 9/00 (2006.01); G01L 25/00 (2006.01); G01D 18/00 (2006.01);
U.S. Cl.
CPC ...
G01L 9/12 (2013.01); G01L 27/002 (2013.01); G01L 27/02 (2013.01); G01D 18/00 (2013.01); G01D 18/008 (2013.01); G01L 1/14 (2013.01); G01L 1/142 (2013.01); G01L 1/148 (2013.01); G01L 9/0072 (2013.01); G01L 9/0073 (2013.01); G01L 9/0075 (2013.01); G01L 25/00 (2013.01); G01L 27/007 (2013.01);
Abstract

Aiming to more easily perform calibration of a sensor output from a pressure sensor, the calibration being necessitated due to the occurrence of sedimentation, a resonance point measurement unit () measures a resonance point of a diaphragm () on the basis of the result obtained by performing measurement of a constant pressure using the pressure sensor while a power supply frequency is changed, a characteristic calculation unit () calculates, on the basis of the measured resonance point, an elastic modulus of the diaphragm () at the time of the measurement of the resonance point, and a correction unit () calculates a corrected sensor sensitivity resulting from correcting a sensor sensitivity of a sensor chip () on the basis of the elastic modulus calculated by the characteristic calculation unit ().


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