The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 14, 2020

Filed:

Feb. 25, 2019
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Nozomu Hirokubo, Shiojiri, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/26 (2006.01); G01R 27/26 (2006.01); G02B 26/00 (2006.01); G01J 3/28 (2006.01); G01J 3/12 (2006.01);
U.S. Cl.
CPC ...
G01J 3/26 (2013.01); G01J 3/28 (2013.01); G01R 27/2605 (2013.01); G02B 26/001 (2013.01); G01J 2003/1226 (2013.01);
Abstract

A spectroscopic apparatus includes: a spectroscopic module; a temperature detector that detects a temperature of the spectroscopic module; and a module controller that controls the spectroscopic module, in which the spectroscopic module includes an interference filter that has a gap changing unit which changes a dimension of a gap between a pair of reflection films, and a capacity detection circuit that outputs a detection signal in accordance with an electrostatic capacity between the pair of reflection films, and in which the module controller corrects a target value of the detection signal that is output from the capacity detection circuit, based on a temperature characteristic of the spectroscopic module and a detection temperature that is detected by the temperature detector, and controls the voltage that is to be applied to the gap changing unit, that the detection signal that is output from the capacity detection circuit is the corrected target value.


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