The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2020
Filed:
Apr. 04, 2018
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventor:
Ryuji Kihara, Matsumoto, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5656 (2012.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
G01C 19/5656 (2013.01); G01P 15/125 (2013.01);
Abstract
A physical quantity sensor includes a base, a suspension beam facing the base, a fixing anchor fixing the suspension beam to the base, a fixed electrode extending orthogonally from the suspension beam, and a movable electrode facing the fixed electrode at an interval. The width of a distal end of the suspension beam distant from the fixing anchor is narrower than the width of a proximal end adjacent to the fixing anchor.