The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2020
Filed:
Mar. 16, 2017
Applicant:
Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;
Inventors:
Ryouichi Takayama, Osaka, JP;
Hideaki Adachi, Osaka, JP;
Takakiyo Harigai, Kyoto, JP;
Yoshiaki Tanaka, Kyoto, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/56 (2012.01); G01C 19/5628 (2012.01); G01J 1/02 (2006.01); H01L 37/02 (2006.01); H01L 41/08 (2006.01); H01L 41/187 (2006.01); H01L 41/047 (2006.01); H01L 41/113 (2006.01); H01L 41/319 (2013.01);
U.S. Cl.
CPC ...
G01C 19/5628 (2013.01); G01J 1/02 (2013.01); H01L 37/02 (2013.01); H01L 37/025 (2013.01); H01L 41/047 (2013.01); H01L 41/0815 (2013.01); H01L 41/113 (2013.01); H01L 41/1876 (2013.01); H01L 41/319 (2013.01); H01L 41/1132 (2013.01);
Abstract
Provided are a structure including: a substrate; a first layer provided on the substrate; a second layer provided on the first layer; and a third layer provided on the second layer, in which the first layer is a layer containing a compound represented by a chemical formula MInOusing M as a metal element, the second layer is a metal layer having a face-centered cubic structure, and the third layer is a ferroelectric film, and a sensor using the structure.