The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2020
Filed:
Jan. 18, 2019
Applicant:
Shimadzu Corporation, Kyoto, JP;
Inventor:
Junichiro Kozaki, Kyoto, JP;
Assignee:
Shimadzu Corporation, Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 31/04 (2006.01); F16K 51/02 (2006.01); G05D 16/20 (2006.01); G05D 16/16 (2006.01); F16K 3/04 (2006.01); F16K 37/00 (2006.01); G05D 16/00 (2006.01); F16K 3/06 (2006.01);
U.S. Cl.
CPC ...
F16K 31/046 (2013.01); F16K 3/04 (2013.01); F16K 3/06 (2013.01); F16K 37/0075 (2013.01); F16K 37/0083 (2013.01); F16K 37/0091 (2013.01); F16K 51/02 (2013.01); G05D 16/024 (2019.01); G05D 16/163 (2013.01); G05D 16/202 (2013.01); G05D 16/208 (2013.01);
Abstract
A target opening degree estimator estimates a target opening degree estimation value as an opening degree of a valve element of a pressure adjustment vacuum valve when a pressure of a vacuum chamber connected to the pressure adjustment vacuum valve reaches a pressure adjustment target pressure based on a correlation between the opening degree of the valve element and the pressure of the vacuum chamber, a current opening degree, and a current pressure.