The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2020
Filed:
Nov. 22, 2017
Applicants:
Boe Technology Group Co., Ltd., Beijing, CN;
Chengdu Boe Optoelectronics Technology Co., Ltd, Chengdu, Suchuan Province, CN;
Inventors:
Assignees:
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., Chengdu, Sichuan Province, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 14/24 (2006.01); B01F 3/04 (2006.01); C23C 14/54 (2006.01); H05B 33/10 (2006.01);
U.S. Cl.
CPC ...
C23C 14/246 (2013.01); B01F 3/04524 (2013.01); C23C 14/24 (2013.01); C23C 14/54 (2013.01); C23C 14/542 (2013.01); H05B 33/10 (2013.01);
Abstract
The present disclosure provides a baffle device for an evaporation apparatus and the evaporation apparatus. The baffle device includes a baffle assembly, configured to separate an evaporation ejection source from a substrate when the substrate is being switched in the evaporation apparatus; and at least one collection device, provided below the baffle assembly, and configured to collect evaporation material falling down from the baffle assembly.