The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 14, 2020

Filed:

Jun. 29, 2017
Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Tobias Frischmuth, Vienna, AT;

Guenter Denifl, Annenheim, AT;

Thomas Grille, Villach, AT;

Ursula Hedenig, Villach, AT;

Markus Kahn, Rangersdorf, AT;

Daniel Maurer, Feld am See, AT;

Ulrich Schmid, Vienna, AT;

Michael Schneider, Vienna, AT;

Assignee:

INFINEON TECHNOLOGIES AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H04R 19/00 (2006.01); B81C 1/00 (2006.01); G01Q 70/14 (2010.01); H04R 7/26 (2006.01); G01L 7/08 (2006.01); G01L 1/00 (2006.01); B81B 3/00 (2006.01); G01Q 60/24 (2010.01); H04R 19/02 (2006.01); H04R 7/10 (2006.01); H04R 19/04 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00658 (2013.01); B81B 3/007 (2013.01); G01L 1/00 (2013.01); G01L 1/005 (2013.01); G01L 7/08 (2013.01); G01Q 60/24 (2013.01); G01Q 70/14 (2013.01); H04R 7/26 (2013.01); H04R 19/02 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/0264 (2013.01); B81B 2201/12 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0127 (2013.01); B81C 2201/0166 (2013.01); H04R 7/10 (2013.01); H04R 19/005 (2013.01); H04R 19/04 (2013.01); H04R 2201/003 (2013.01);
Abstract

A micromechanical structure in accordance with various embodiments may include: a substrate; and a functional structure arranged at the substrate; wherein the functional structure includes a functional region which is deflectable with respect to the substrate responsive to a force acting on the functional region; and wherein at least a section of the functional region has an elastic modulus in the range from about 5 GPa to about 70 GPa.


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